• Integrated Single-Sided Roll-to-Roll Evaporation & Sputtering Coating Equipment

    PRODUCTS AND SERVICES > Roll To Roll And Optical Equipment Series > Integrated Single-Sided Roll-to-Roll Evaporation & Sputtering Coating Equipment

    Integrated Single-Sided Roll-to-Roll Evaporation & Sputtering Coating Equipment

      Features  

    ·Combined evaporation & sputtering chamber; 

    ·Evaporation Chamber: single-sided evaporation for coating of low-temperatureevaporation materials (Al,Li,etc.); 

    ·Sputtering Chamber: 6 pairs of rotating targets, replaceable with planar targets; 

    ·Post-process Chamber: available for heating, cooling, gas treatment and plasmaprocessing, etc.

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